Abstract
We provide a progress report of a continuing collaboration between the Kurt J. Lesker Company, and Carnegie Mellon University. We are developing and transferring an important manufacturing technology from an academic to an industrial environment and are using magnetron sputtering as a reliable technique for the deposition of epitaxial, high-quality electro-optics layers and light-emitting devices. Results are presented for LiNbO3 and Si3N4.
| Original language | English |
|---|---|
| Pages (from-to) | 1209-1219 |
| Number of pages | 11 |
| Journal | Nuovo Cimento della Societa Italiana di Fisica D - Condensed Matter, Atomic, Molecular and Chemical Physics, Biophysics |
| Volume | 20 |
| Issue number | 7 |
| DOIs | |
| State | Published - 1998 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- General Physics and Astronomy
Disciplines
- Business
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