The role of Si3N4 layers in determining the texture of sputter deposited LiNbO3 thin films

S. Tan; T. E. Schlesinger; M. Migliuolo

doi:10.1063/1.116270

The role of Si3N4 layers in determining the texture of sputter deposited LiNbO3 thin films

S. Tan
, T. E. Schlesinger
, M. Migliuolo

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2651-2653
Number of pages	3
Journal	Applied Physics Letters
Volume	68
Issue number	19
DOIs	https://doi.org/10.1063/1.116270
State	Published - 1996
Externally published	Yes

ASJC Scopus Subject Areas

Physics and Astronomy (miscellaneous)

Disciplines

Business

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10.1063/1.116270

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title = "The role of Si3N4 layers in determining the texture of sputter deposited LiNbO3 thin films",

author = "S. Tan and Schlesinger, \{T. E.\} and M. Migliuolo",

year = "1996",

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journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

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T1 - The role of Si3N4 layers in determining the texture of sputter deposited LiNbO3 thin films

AU - Tan, S.

AU - Schlesinger, T. E.

AU - Migliuolo, M.

PY - 1996

Y1 - 1996

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DO - 10.1063/1.116270

M3 - Article

AN - SCOPUS:0000745282

SN - 0003-6951

VL - 68

SP - 2651

EP - 2653

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 19

ER -

The role of Si3N4 layers in determining the texture of sputter deposited LiNbO3 thin films

ASJC Scopus Subject Areas

Disciplines

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