Abstract
Transmission electron microscopy (TEM) was used to investigate the structural properties of sputter-deposited yttria-stabilized zirconia (YSZ) thin films. YSZ films were deposited over a range of temperatures and background oxygen levels. Additionally, a multilayered structure was produced by cyclic application of a substrate bias. Plan-view TEM showed that temperature and oxygen levels did not have a significant effect on grain size but did alter the phases present in the thin films. Cross-sectional TEM showed the development of texture in the multilayer film, both within the individual layers and in the entire film.
| Original language | English |
|---|---|
| Pages (from-to) | 195-200 |
| Number of pages | 6 |
| Journal | Journal of Materials Research |
| Volume | 18 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 2003 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
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